12 Inches vertical Boat

12-Inch Vertical Quartz Boat - Product Specification

Designed for semiconductor wafer processing and high-temperature applications, this vertical quartz boat ensures precision handling and thermal stability in diffusion, oxidation, and annealing furnaces1013.

Key Features

Material & Construction‌

Ultra-High Purity Fused Quartz‌: SiO₂ ≥99.99% with ≤0.1 ppb metallic impurities10.

‌Vertical Slot Design‌: Accommodates 12-inch (300mm) wafers in upright position, minimizing particle contamination during transfer14.

‌Reinforced Structural Integrity‌: Laser-welded joints withstand thermal cycling up to 1,200°C1014.

‌Performance Specifications‌

Parameter‌ ‌Value‌

‌Wafer Capacity‌ 25–50 wafers (standard)

‌Max Operating Temp‌ 1,250°C continuous use10

‌Thermal Shock ΔT‌ ≥1,000°C (air-to-air) 14

‌Surface Roughness‌ Ra ≤0.2μm (post-polishing) 10

‌Compatibility & Standards‌

Compatible with all major diffusion/LPCVD tube furnaces13.

Meets SEMI F20/F72 standards for contamination control (<5 ppb metal ions)10.

Acid-resistant chemistry: Sustains HF/HCl cleaning protocols13.

Applications:Vertical batch processing for 12-inch wafer oxidation/doping10.

High-temperature annealing in IC manufacturing14.

Carrier for plasma etching/cleaning systems13.

Customization Options Slot pitch adjustment (5–10mm spacing)14.

Integrated handling flanges for robotic automation14.

Anti-sagging supports for extended-length designs (>1,000mm)10.

⚠️ ‌Critical Handling Notes‌:

Avoid mechanical impact on slot edges to prevent micro-cracks10.

Clean exclusively with semiconductor-grade SC1/SC2 solutions13.

Store in ISO Class 4 cleanroom environments only10.

Engineered for ≤0.01% wafer breakage rate and >500 thermal cycles lifespan