8 Inches Vertical Boat

8-Inch Vertical Quartz Boat - Product Specification

Engineered for semiconductor wafer processing in high-temperature environments, this vertical quartz boat ensures precision handling and thermal stability for diffusion, oxidation, and annealing applications1.

Key Features

‌Material & Construction‌

‌Ultra-High Purity Fused Quartz‌: SiO₂ ≥99.99% with minimal metallic impurities17.

‌Vertical Slot Configuration‌: Optimized for 8-inch (200mm) wafer stability, reducing particle contamination during transfer1.

‌Laser-Welded Joints‌: Enhanced structural resilience against thermal cycling up to 1,200°C7.

‌Performance Specifications‌

‌Parameter‌ ‌Value‌

‌Wafer Capacity‌ 25–50 wafers (standard batch)

‌Max Operating Temp‌ 1,250°C (continuous use)17

‌Thermal Shock ΔT‌ ≥1,000°C (air-to-air)1

‌Surface Roughness‌ Ra ≤0.2μm (polished finish)10

‌Compatibility & Standards‌

Compatible with major diffusion/LPCVD tube furnaces17.

Acid-resistant chemistry: Withstands HF/HCl cleaning protocols7.

Meets semiconductor contamination control standards (<5 ppb metal ions)1.

Applications

Vertical batch processing for 8-inch wafer oxidation/doping1.

High-temperature annealing in IC manufacturing7.

Carrier for etch and deposition systems1.

Customization Options

Slot pitch adjustments (5–10mm spacing)1.

Integrated handling flanges for robotic automation7.

Anti-sagging supports for extended designs (>800mm)1.

⚠️ ‌Critical Handling Notes‌

Avoid mechanical impact on slot edges to prevent micro-fractures1.

Clean exclusively with semiconductor-grade SC1/SC2 solutions17.

Store in ISO Class 4+ cleanroom environments