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Smeiconductor Grade Quartz Rod

Semiconductor Grade Quartz Rod - Technical Specifications

Ultra-high-purity fused silica rods engineered for critical semiconductor manufacturing processes, ensuring contamination-free performance under extreme thermal and chemical conditions13.


Core Properties

  • Extreme Material Purity‌:

    99.9995% SiO₂ composition with total metallic impurities ≤0.1 ppm, preventing wafer contamination25.

  • Thermal Stability‌:
    Sustains 1,200°C operational temperatures and rapid thermal shocks (ΔT >900°C) without devitrification34.

  • Radiation Resistance‌:
    Low OH⁻ content (<5 ppm) minimizes UV-induced degradation in lithography systems17.

Precision Specifications

ParameterSpecification
Diameter2–50 mm ±0.05 mm tolerance34
Length≤1,500 mm (customizable)46
Surface RoughnessOptical polish (Ra ≤0.4 μm)16
Thermal Expansion5.5×10⁻⁷/℃ (20–1,000°C)46
Light Transmission>92% @ 193 nm DUV wavelength17

Key Advantages

  1. Contamination Control‌:
    Near-zero alkali metal content (Na+K <1 ppm) eliminates ionic contamination in wafer fabs89.

  2. Plasma Resistance‌:
    Exceptional etch resistance against fluorine/chlorine plasmas in etching/deposition chambers110.

  3. Mechanical Integrity‌:
    Mohs hardness 7 with flexural strength >70 MPa for robotic handling reliability46.


Primary Applications

  • Single Crystal Growth‌:
    Bridging rods for CZ silicon pullers, ensuring ultra-low dislocation density39.

  • Photolithography Systems‌:
    EUV mirror substrates and alignment fixtures requiring nanoscale stability17.

  • Etch/Deposition Hardware‌:
    Electrode shafts and plasma confinement rings in 3nm-node process tools210.

⚠️ ‌Critical Handling Protocols

  • Cleaning‌:
    Use HF solution (≤5%) ≤3 minutes; rinse with 18 MΩ·cm DI water immediately38.

  • Installation‌:
    Apply PTFE ferrules with ≤0.3 N·m torque for vacuum-sealed connections11.


Compliance: SEMI F57 certified; RoHS/REACH compliant. Traceability lot numbers provided5


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