Synthetic Quartz Tube

Synthetic Quartz Tube - Technical Specifications

Ultra-pure fused silica tubes manufactured via advanced vapor deposition technology for critical applications in semiconductor, fiber optics, and high-purity analytical systems, featuring exceptional chemical inertness and thermal stability15.

Core Material Properties

‌Ultra-High Purity‌

‌Composition‌: SiO₂ >99.99% with metallic impurities <0.1 ppm, minimizing ionic contamination in sensitive processes510.

‌Optical Performance‌: >92% UV-VIS transmission (190–700 nm) and low OH content (<5 ppm) for laser applications814.

‌Thermal Resilience‌: Softening point 1,730°C; continuous operation up to 1,200°C without devitrification1114.

‌Precision Geometry‌

‌Parameter‌ ‌Specification‌

‌Outer Diameter‌ 1–300 mm ±0.05 mm tolerance18

‌Wall Thickness‌ 0.5–20 mm ±0.1 mm1

‌Length‌ ≤3,000 mm (customizable)8

‌Surface Finish‌ Ra ≤0.5 μm (optical polish)58

Manufacturing Technology

‌Gas-Phase Synthesis‌:

Hydrolysis of SiCl₄ in hydrogen-oxygen flame, enabling nano-scale homogeneity and bubble-free structure1014.

‌Defect Control‌:

Strict process monitoring eliminates micro-cracks and inclusions for high-pressure/vacuum environments511.

Key Advantages

‌Chemical Resistance‌:

Impervious to acids, halogens, and plasma erosion (e.g., HF, Cl₂)1114.

‌Thermal Shock Tolerance‌:

Withstands ΔT >800°C (air-to-air) for rapid thermal processing11.

‌Electrical Insulation‌:

Dielectric strength >25 kV/cm for semiconductor furnace components12.

Primary Applications

‌Semiconductor Fabrication‌:

Diffusion furnace tubes for wafer processing1112.

CVD reaction chambers and gas injectors18.

‌Fiber Optics‌:

Preform support sleeves for fiber drawing58.

UV-curing sleeves for coating systems14.

‌Analytical Instruments‌:

High-temperature sample cells for ICP-MS/ICP-OES5.

Quartz capillaries for chromatography5.

⚠️ ‌Critical Handling Protocols‌

‌Thermal Cycling‌:

Limit ramp rates to ≤10°C/min above 600°C to prevent fracture1114.

‌Cleaning‌:

Use semiconductor-grade IPA or SC1 solution; alkaline cleaners prohibited1114.

‌Installation‌:

Avoid mechanical stress at flange connections; apply uniform torque ≤0.3 N·m8.

Custom options include spiral structures, ITO coatings, and laser-etched markings814.

‌Compliance‌: RoHS/REACH certified; meets SEMI F57 standards for semiconductor use