Semiconductor Grade Quartz Tube

Semiconductor Grade Quartz Tube - Technical Specifications

Ultra-high purity fused silica tubes engineered for critical semiconductor fabrication processes, featuring exceptional chemical inertness, thermal stability, and strict compliance with industry standards12.

Core Material Properties

‌Ultra-High Purity‌

‌Composition‌: SiO₂ >99.9995% with metallic impurities <0.1 ppm, minimizing ionic contamination during wafer processing25.

‌Thermal Performance‌: Continuous operation at 1,200°C; softening point 1,730°C1.

‌Optical Clarity‌: >92% UV-VIS transmission (190–700 nm) for process monitoring applications13.

‌Precision Geometry‌

‌Parameter‌ ‌Specification‌

‌Outer Diameter‌ 1–450 mm ±0.05 mm tolerance13

‌Wall Thickness‌ 0.75–20 mm ±0.1 mm1

‌Length‌ ≤3,000 mm (customizable)13

‌Surface Finish‌ Optical polish (Ra ≤0.5 μm) or fire-polished13

Semiconductor-Specific Features

‌Defect Control‌:

Bubble-free structure with ≤0.05 ppm leachable ions, preventing wafer contamination25.

‌Chemical Resistance‌:

Resists HF, HCl, and plasma erosion in etching/diffusion processes15.

‌Thermal Shock Tolerance‌:

Withstands ΔT ≥800°C (air-to-air) for rapid thermal cycling1.

Primary Applications

‌Wafer Processing Equipment‌:

Diffusion furnace tubes for 200 mm/300 mm晶圆 production lines5.

CVD reactor liners and gas injectors12.

‌Etching Systems‌:

High-purity flanges and rings for corrosive environments2.

‌Cleaning Modules‌:

Solvent-resistant tubes for wet bench stations1.

Customization Options

‌Deep Processing‌:

Laser cutting, bending, frosting, and end-fire sealing13.

‌Special Designs‌:

Spiral structures, flanged connections, and sandblasted markings23.

⚠️ ‌Critical Handling Protocols‌

‌Cleaning‌:

Use semiconductor-grade IPA or SC1 solutions; ‌strictly avoid alkaline cleaners‌15.

‌Thermal Cycling‌:

Limit ramp rates to ≤10°C/min above 600°C15.

‌Storage‌:

Nitrogen-purged containers to prevent surface adsorption2.

‌Compliance‌: Meets SEMI F57 standards for semiconductor manufacturing5; RoHS/REACH certified23．