Applications
- Optical Devices
: Used in lenses, windows, and filters for ultraviolet (UV) and infrared (IR) optical systems due to its exceptional light transmission across broad spectra12.
- Semiconductor Manufacturing
: Serves as substrates, carriers, or reaction chamber components in high-temperature processes26.
- UV Light Sources
: Employed in UV lamp tubes and photolithography equipment for its high UV transparency12.
- Laboratory and Industrial Equipment
: Utilized in high-purity environments (e.g., chemical reactors) for its chemical inertness and thermal stability26.
Optical Properties
- Broad Spectral Transmission
:
Transmits 90% at 185 nm (JGS1) and over 85% in the IR range (260–3500 nm, JGS3)12.
Effective across UV (185–2500 nm) to IR (up to 3500 nm) wavelengths26.
- High Thermal Stability
: Withstands extreme temperatures (up to 1200°C) with minimal thermal expansion26.
- Chemical Resistance
: Resists corrosion from acids, gases, and high-purity environments26.
- Low Optical Distortion
: Maintains clarity and uniformity under intense light or radiation12.
Key Material Grades
- JGS1 (Far-UV Grade)
: Optimal for deep UV applications (e.g., semiconductor lithography)2.
- JGS2 (UV-Visible Grade)
: Suitable for 220–2500 nm range2.
- JGS3 (IR Grade)
: Ideal for IR optics and high-temperature environments2.
These properties make quartz glass discs critical in precision optics, advanced manufacturing, and research12.